Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521879 | Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod | Toshihiko Miyajima, Takeshi Kagaya | 2022-12-06 |
| 11199528 | Sensor built-in filter structure and wafer accommodation container | Toshihiko Miyajima, Takeshi Kagaya | 2021-12-14 |
| 11135623 | Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method | Mutsuo Sasaki | 2021-10-05 |