Issued Patents All Time
Showing 201–205 of 205 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451701 | Method for making low-resistance silicide contacts between closely spaced electrically conducting lines for field effect transistors | Shwangming Jeng, Shau-Lin Shue | 2002-09-17 |
| 6358844 | Tungsten deposition process with dual-step nucleation | Shau-Lin Shue | 2002-03-19 |
| 6242338 | Method of passivating a metal line prior to deposition of a fluorinated silica glass layer | Chung-Shi Liu, Shau-Lin Shue, Yao-Yi Cheng, Chen-Hua Yu | 2001-06-05 |
| 6096651 | Key-hole reduction during tungsten plug formation | Chen-Hua Yu, Shau-Lin Shue | 2000-08-01 |
| 6077779 | Multi-step deposition to improve the conformality of ionized PVD films | Shaulin Shue | 2000-06-20 |