Issued Patents All Time
Showing 101–108 of 108 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653944 | Semiconductor wafer transport pod equipped with cover latch indicator | Am-Ming Chiang | 2003-11-25 |
| 6503124 | Method for endpoint detection for copper CMP | Fu-Sheng Lee, Chien-Chen Chen, Jiun-Chung Lee | 2003-01-07 |
| 6179691 | Method for endpoint detection for copper CMP | Fu-Sheng Lee, Chien-Chen Chen, Jiun-Chung Lee | 2001-01-30 |
| 6032704 | Method and apparatus for storing wafers without moisture absorption | Yeh-Jye Wann, Hsi-Shan Kuo | 2000-03-07 |
| 5731243 | Method of cleaning residue on a semiconductor wafer bonding pad | Tzu-Min Peng, Yung-Haw Liaw, Cheng-Te Chu | 1998-03-24 |
| 5454871 | SOG coated apparatus to solve SOG non-uniformity in the VLSI process | Yung-Haw Liaw, Pao-Ling Kuo | 1995-10-03 |
| 5434096 | Method to prevent silicide bubble in the VLSI process | Cheng-Te Chu, Yung-Haw Liaw, Tien-Chang Chang | 1995-07-18 |
| 5371046 | Method to solve sog non-uniformity in the VLSI process | Yung-Haw Liaw, Pao-Ling Kuo | 1994-12-06 |