Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503124 | Method for endpoint detection for copper CMP | Fu-Sheng Lee, Chien-Chen Chen, Hsin-Chieh Huang | 2003-01-07 |
| 6179691 | Method for endpoint detection for copper CMP | Fu-Sheng Lee, Chien-Chen Chen, Hsin-Chieh Huang | 2001-01-30 |
| 5956609 | Method for reducing stress and improving step-coverage of tungsten interconnects and plugs | Hui Wang, Jowei Dun, Ken-Shen Chou | 1999-09-21 |