FC

Fa-Yuan Chang

TSMC: 5 patents #4,208 of 12,232Top 35%
Overall (All Time): #1,023,367 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
8084361 Semiconductor fabrication method suitable for MEMS Tsung-Cheng Huang, Hua-Shu Wu, I-Ching Lin, Hsi-Lung Lee, Yuan-Hao Chien 2011-12-27
7732299 Process for wafer bonding Tsung-Mu Lai, Kai-Chih Liang, Hua-Shu Wu, Chin-Hsiang Ho, Gwo-Yuh Shiau +6 more 2010-06-08
7696766 Ultra-fine pitch probe card structure Hsu Ming Cheng, Clinton Chao, Hua-Shu Wu 2010-04-13
6679064 Wafer transfer system with temperature control apparatus Chih-Wei Chang, Cheng-Ting Tseng, Chin-Chang Chen, Cheng-Cheng Chang, Shih-Fang Chen 2004-01-20
6069091 In-situ sequential silicon containing hard mask layer/silicon layer plasma etch method Ming-Yeon Hung 2000-05-30