Issued Patents All Time
Showing 76–87 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6194306 | Mask and method for forming dynamic random access memory (DRAM) contacts | Michael Keleher, Troy H. Herndon, Jing Shu | 2001-02-27 |
| 6136700 | Method for enhancing the performance of a contact | Peter S. McAnally, Dirk N. Anderson | 2000-10-24 |
| 5972769 | Self-aligned multiple crown storage capacitor and method of formation | Robert Tsu, Jing Shu, Isamu Asano | 1999-10-26 |
| 5960304 | Method for forming a contact to a substrate | Peter S. McAnally | 1999-09-28 |
| 5909628 | Reducing non-uniformity in a refill layer thickness for a semiconductor device | Amitava Chatterjee, Theodore W. Houston, Ih-Chin Chen, Agerico L. Esquirel, Somnath Nag +4 more | 1999-06-01 |
| 5804088 | Intermediate layer lithography | — | 1998-09-08 |
| 5739052 | Apparatus and method for detecting defects in insulative layers of MOS active devices | Srikanth Krishnan | 1998-04-14 |
| 5726085 | Method of fabricating a dynamic random access memory (DRAM) cell capacitor using hemispherical grain (HSG) polysilicon and selective polysilicon etchback | Darius Crenshaw, Rick L. Wise | 1998-03-10 |
| 5596207 | Apparatus and method for detecting defects in insulative layers of MOS active devices | Srikanth Krishnan | 1997-01-21 |
| 5084126 | Method and apparatus for uniform flow distribution in plasma reactors | — | 1992-01-28 |
| 4922731 | Quartz conductive baffles for heat removal and method | Joseph K. Russell | 1990-05-08 |
| 4915807 | Method and apparatus for processing a semiconductor wafer | — | 1990-04-10 |