Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5790252 | Method of and apparatus for determining residual damage to wafer edges | Hisashi Masumura, Shingo Sumie, Hidetoshi Tsunaki, Yuji Hirao, Noritaka Morioka | 1998-08-04 |
| 5768243 | Optical recording medium and its recording apparatus and reproducing apparatus | Yoshimi Tomita | 1998-06-16 |
| 5759087 | Method for inducing damage for gettering to single crystal silicon wafer | Hisashi Masumura, Masami Nakano | 1998-06-02 |
| 5705423 | Epitaxial wafer | Atsuto Sakata, Hisashi Masumura | 1998-01-06 |
| 5679212 | Method for production of silicon wafer and apparatus therefor | Tadahiro Kato | 1997-10-21 |
| 5656348 | Optical recording medium and its recording apparatus and reproducing apparatus | Yoshimi Tomita | 1997-08-12 |
| 5595412 | Device for handling wafers | Isao Uchiyama | 1997-01-21 |
| 5555634 | Wafer holder | Isao Uchiyama | 1996-09-17 |
| 5547515 | Method for handling or processing semiconductor wafers | Isao Uchiyama, Yoshiharu Kimura, Morie Suzuki, Takashi Tanakajima | 1996-08-20 |
| 5503173 | Wafer cleaning tank | Isao Uchiyama | 1996-04-02 |
| 5474644 | Method and apparatus for high-flatness etching of wafer | Tadahiro Kato | 1995-12-12 |
| 5447890 | Method for production of wafer | Tadahiro Kato, Sunao Shima, Masami Nakano, Hisashi Masumura | 1995-09-05 |
| 5317778 | Automatic cleaning apparatus for wafers | Isao Uchiyama, Yoshiharu Kimura, Morie Suzuki, Takashi Tanakajima | 1994-06-07 |
| 5282289 | Scrubber apparatus for cleaning a thin disk work | Fumihiko Hasegawa, Makoto Tsukada, Masayuki Yamada, Isao Uchiyama | 1994-02-01 |
| 5185730 | Method for reading data from optical disk | Toshihiro Komaki, Tomonori Ishizuki, Shinichi Yokozeki | 1993-02-09 |
| 5179547 | Phase change optical information recording medium including means for preventing movement of the recorded portion | Toshihiro Komaki, Tomonori Ishizuki, Ryoichi Hirota, Masahiro Katsumura, Seishi Maita | 1993-01-12 |
| 5126027 | Thin film forming method and system | Shigeru Tani, Yasushi Tamaki, Genichi Ishida, Shoji Ishida, Seigo Toyofuku +1 more | 1992-06-30 |
| 5117590 | Method of automatically chamfering a wafer and apparatus therefor | Makoto Takaoka | 1992-06-02 |
| 5081733 | Automatic cleaning apparatus for disks | — | 1992-01-21 |
| 5039558 | Optical recording medium and method of manufacturing thereof | Kunio Imai, Saburo Aso, Masataka Uchidoi | 1991-08-13 |
| 5025439 | Method for recording and reproducing of information on an optical disk of a phase-change type | Toshihiro Komaki, Tomonori Ishizuki, Shinichi Yokozeki | 1991-06-18 |
| 4950520 | Optical recording medium and method manufacturing thereof | Kunio Imai, Saburo Aso, Masataka Uchidoi | 1990-08-21 |