Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319845 | Method of purifying alkaline solution and method of etching semiconductor wafers | Hiroyuki Takamatsu, Toshio Ajito | 2001-11-20 |
| 6110839 | Method of purifying alkaline solution and method of etching semiconductor wafers | Masami Nakano, Toshio Ajito, Hideo Kudo | 2000-08-29 |
| 5665168 | Method for cleaning semiconductor silicon wafer | Masami Nakano, Hiroyuki Takamatsu | 1997-09-09 |
| 5662743 | Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds | Masami Nakano, Hiroyuki Takamatsu, Morie Suzuki | 1997-09-02 |
| 5640238 | Method of inspecting particles on wafers | Masami Nakano, Hiroyuki Takamatsu, Morie Suzuki | 1997-06-17 |
| 5626681 | Method of cleaning semiconductor wafers | Masami Nakano, Hiroyuki Takamatsu | 1997-05-06 |
| 5595412 | Device for handling wafers | Hideo Kudo | 1997-01-21 |
| 5581837 | Brush cleaning apparatus and cleaning system for disk-shaped objects using same | Masami Nakano, Hiroyuki Takamatu, Morie Suzuki | 1996-12-10 |
| 5555634 | Wafer holder | Hideo Kudo | 1996-09-17 |
| 5547515 | Method for handling or processing semiconductor wafers | Hideo Kudo, Yoshiharu Kimura, Morie Suzuki, Takashi Tanakajima | 1996-08-20 |
| 5503173 | Wafer cleaning tank | Hideo Kudo | 1996-04-02 |
| 5317778 | Automatic cleaning apparatus for wafers | Hideo Kudo, Yoshiharu Kimura, Morie Suzuki, Takashi Tanakajima | 1994-06-07 |
| 5282289 | Scrubber apparatus for cleaning a thin disk work | Fumihiko Hasegawa, Makoto Tsukada, Hideo Kudo, Masayuki Yamada | 1994-02-01 |
| 5081795 | Polishing apparatus | Kouichi Tanaka | 1992-01-21 |