Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5662743 | Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds | Masami Nakano, Isao Uchiyama, Hiroyuki Takamatsu | 1997-09-02 |
| 5640238 | Method of inspecting particles on wafers | Masami Nakano, Isao Uchiyama, Hiroyuki Takamatsu | 1997-06-17 |
| 5581837 | Brush cleaning apparatus and cleaning system for disk-shaped objects using same | Isao Uchiyama, Masami Nakano, Hiroyuki Takamatu | 1996-12-10 |
| 5547515 | Method for handling or processing semiconductor wafers | Hideo Kudo, Isao Uchiyama, Yoshiharu Kimura, Takashi Tanakajima | 1996-08-20 |
| 5317778 | Automatic cleaning apparatus for wafers | Hideo Kudo, Isao Uchiyama, Yoshiharu Kimura, Takashi Tanakajima | 1994-06-07 |