Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001360 | Shape measurement device and shape measurement method | Masato Kannaka, Kazuhiko Tahara, Hideki Matsuoka, Noritaka Morioka | 2018-06-19 |
| 8649019 | Shape determining device | Masato Kannaka, Eiji Takahashi, Masakazu Kajita, Hideki Matsuoka, Noritaka Morioka +2 more | 2014-02-11 |
| 5790252 | Method of and apparatus for determining residual damage to wafer edges | Hisashi Masumura, Hideo Kudo, Shingo Sumie, Yuji Hirao, Noritaka Morioka | 1998-08-04 |