Issued Patents All Time
Showing 26–50 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7189493 | Polymer, positive resist composition, and patterning process using the same | Jun Hatakeyama, Yuji Harada | 2007-03-13 |
| 7169869 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2007-01-30 |
| 7125641 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7125643 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7125642 | Sulfonates, polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7067231 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-06-27 |
| 7005228 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2006-02-28 |
| 7001707 | Resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-02-21 |
| 6946235 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-09-20 |
| 6933095 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2005-08-23 |
| 6916592 | Esters, polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-07-12 |
| 6875556 | Resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-04-05 |
| 6872514 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-03-29 |
| 6866983 | Resist compositions and patterning process | Jun Hatakeyama, Yuji Harada | 2005-03-15 |
| 6864037 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2005-03-08 |
| 6861197 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Jun Hatakeyama, Masaru Sasago, Masayuki Endo +5 more | 2005-03-01 |
| 6855477 | Chemically amplified resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-02-15 |
| 6841334 | Onium salts and positive resist materials using the same | Fujio Yagihashi, Tomoyoshi Furihata, Jun Watanabe, Akinobu Tanaka, Tadahito Matsuda | 2005-01-11 |
| 6824955 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2004-11-30 |
| 6790586 | Resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Jun Watanabe, Masaru Sasago, Masayuki Endo +5 more | 2004-09-14 |
| 6790591 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama | 2004-09-14 |
| 6710148 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Masaru Sasago, Masayuki Endo +5 more | 2004-03-23 |
| 6680389 | Ester compounds | Yuji Harada, Jun Hatakeyama, Michitaka Ootani, Satoru Miyazawa, Kentaro Tsutsumi +1 more | 2004-01-20 |
| 6667415 | Tertiary butyl 4,4-bis(4′-hydroxyphenyl) pentanoate derivatives and positive resist materials containing the same | Fujio Yagihashi, Jun Watanabe, Minoru Takamizawa, Akinobu Tanaka, Tadahito Matsuda | 2003-12-23 |
| 6623909 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Toshiaki Takahashi, Toshinobu Ishihara, Jun Watanabe, Tohru Kubota | 2003-09-23 |