Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502247 | Method for forming coating film for lithography | Tsutomu Ogihara | 2016-11-22 |
| 9201301 | Method for producing resist composition | Tsutomu Ogihara, Yusuke Biyajima, Motoaki Iwabuchi | 2015-12-01 |
| 8945809 | Fluorinated monomer, fluorinated polymer, resist composition, and patterning process | Koji Hasegawa, Masayoshi Sagehashi, Yuji Harada, Takao Yoshihara | 2015-02-03 |
| 8916331 | Resist composition and patterning process | Koji Hasegawa, Takeshi Sasami, Yuji Harada | 2014-12-23 |
| 8778592 | Positive resist composition and patterning process | Jun Hatakeyama, Takeshi Nagata | 2014-07-15 |