Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11609497 | Resist composition and patterning process | Kenji Yamada, Jun Hatakeyama, Satoshi Watanabe | 2023-03-21 |
| 11327400 | Patterning process | Jun Hatakeyama, Tomohiro Kobayashi | 2022-05-10 |
| 11163232 | Resist composition, patterning process, and barium salt | Jun Hatakeyama, Masaki Ohashi | 2021-11-02 |
| 11156916 | Resist composition and patterning process | Jun Hatakeyama | 2021-10-26 |
| 10520809 | Resist composition and patterning process | Jun Hatakeyama, Masaki Ohashi | 2019-12-31 |
| 10474030 | Resist composition and patterning process | Jun Hatakeyama, Masaki Ohashi | 2019-11-12 |
| 10078264 | Resist composition, patterning process, and barium, cesium and cerium salts | Jun Hatakeyama, Masaki Ohashi | 2018-09-18 |
| 9261783 | Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acid | Takeshi Kinsho, Yuuki Suka, Yuji Harada, Koji Hasegawa | 2016-02-16 |
| 9115074 | Fluorinated monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa | 2015-08-25 |
| 8916331 | Resist composition and patterning process | Koji Hasegawa, Yuji Harada, Taku Morisawa | 2014-12-23 |
| 8815492 | Chemically amplified positive resist composition for ArF immersion lithography and pattern forming process | Youichi Ohsawa, Masaki Ohashi, Jun Hatakeyama | 2014-08-26 |
| 8697903 | Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acid | Takeshi Kinsho, Yuuki Suka, Yuji Harada, Koji Hasegawa | 2014-04-15 |
| 8647808 | Fluorinated monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa | 2014-02-11 |
| 8420292 | Polymer, resist composition, and patterning process | Yuji Harada, Takeru Watanabe, Yuuki Suka, Koji Hasegawa | 2013-04-16 |
| 7851157 | Oligonucleotide derivative, probe for detection of gene, and DNA chip | Mitsuo Sekine, Kohji Seio, Akihiro Ohkubo, Kazushi Sakamoto | 2010-12-14 |