Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9261783 | Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acid | Takeshi Kinsho, Yuji Harada, Koji Hasegawa, Takeshi Sasami | 2016-02-16 |
| 9086628 | Resist protective film-forming composition and patterning process | Koji Hasegawa, Yuji Harada | 2015-07-21 |
| 8795946 | Polymerizable ester compound, polymer, resist composition, and patterning process | Koji Hasegawa, Masayoshi Sagehashi, Masashi Ilo | 2014-08-05 |
| 8697903 | Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acid | Takeshi Kinsho, Yuji Harada, Koji Hasegawa, Takeshi Sasami | 2014-04-15 |
| 8420292 | Polymer, resist composition, and patterning process | Yuji Harada, Takeru Watanabe, Takeshi Sasami, Koji Hasegawa | 2013-04-16 |