Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795946 | Polymerizable ester compound, polymer, resist composition, and patterning process | Koji Hasegawa, Masayoshi Sagehashi, Yuuki Suka | 2014-08-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795946 | Polymerizable ester compound, polymer, resist composition, and patterning process | Koji Hasegawa, Masayoshi Sagehashi, Yuuki Suka | 2014-08-05 |