Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9328429 | Method for evaluating degree of crystal orientation in polycrystalline silicon, selection method for polycrystalline silicon rods, and production method for single crystal silicon | Shuichi Miyao, Junichi Okada | 2016-05-03 |
| 9274069 | Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline silicon | Shuichi Miyao, Junichi Okada | 2016-03-01 |
| 9263261 | Method for supplying source gas for producing polycrystalline silicon and polycrystalline silicon | Yasushi Kurosawa | 2016-02-16 |
| 9193596 | Reactor for producing polycrystalline silicon, system for producing polycrystalline silicon, and process for producing polycrystalline silicon | Kyoji Oguro, Takaaki Shimizu, Yasushi Kurosawa, Fumitaka Kume | 2015-11-24 |
| 9126242 | Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jar | Yasushi Kurosawa, Kyoji Oguro, Shinichi Kurotani | 2015-09-08 |
| 9017482 | System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon | Kyoji Oguro, Takaaki Shimizu, Yasushi Kurosawa, Fumitaka Kume | 2015-04-28 |
| 9006002 | Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rod | Fumitaka Kume, Junichi Okada | 2015-04-14 |
| 8793853 | Core wire holder for producing polycrystalline silicon and method for producing polycrystalline silicon | Shinichi Kurotani, Kyoji Oguro, Fumitaka Kume | 2014-08-05 |
| 8328935 | Method of manufacturing polycrystalline silicon rod | Michihiro Mizuno, Shinichi Kurotani, Kyoji Oguro | 2012-12-11 |
| 7582221 | Wafer manufacturing method, polishing apparatus, and wafer | Hisashi Masumura | 2009-09-01 |
| 7203559 | Method for manufacturing semiconductor wafer, method for receiving order for manufacture of semiconductor wafer, and system for receiving order for manufacture of semiconductor wafer | Tatsuo Ito, Masashi Ichikawa, Nobuhiro Ohara | 2007-04-10 |
| 6787797 | Semiconductor wafer and device for semiconductor device manufacturing process | Kiyoshi Demizu, Tadahiro Kato | 2004-09-07 |
| 6099748 | Silicon wafer etching method and silicon wafer etchant | Bee Chin Lim, Yee Ping Yap | 2000-08-08 |
| 6003527 | Cleaning apparatus and a cleaning method | Yasuyuki Harada, Kazuhiko Shiba | 1999-12-21 |
| 5733434 | Apparatus and method for cleaning semiconductor wafers | Yasuyuki Harada, Shouichi Miura | 1998-03-31 |
| 5725753 | Apparatus and method for cleaning semiconductor wafers | Yasuyuki Harada | 1998-03-10 |
| 5538465 | Elastic foamed sheet and wafer-polishing jig using the sheet | Kihachiro Watanabe, Makoto Tsukada | 1996-07-23 |
| 5409770 | Elastic foamed sheet and wafer-polishing jig using the sheet | Kihachiro Watanabe, Makoto Tsukada | 1995-04-25 |
| 5186192 | Apparatus for cleaning silicon wafer | Masaki Kameya, Yasuyuki Harada, Hiroshi Amano | 1993-02-16 |