Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5186192 | Apparatus for cleaning silicon wafer | Shigeyoshi Netsu, Yasuyuki Harada, Hiroshi Amano | 1993-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5186192 | Apparatus for cleaning silicon wafer | Shigeyoshi Netsu, Yasuyuki Harada, Hiroshi Amano | 1993-02-16 |