Issued Patents All Time
Showing 76–100 of 100 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7459261 | Resist composition and patterning process using the same | Jun Hatakeyama, Youichi Ohsawa | 2008-12-02 |
| 7202318 | Polymerizable fluorinated ester, manufacturing method, polymer, photoresist composition and patterning process | Takeshi Kinsho, Takeru Watanabe, Jun Hatakeyama | 2007-04-10 |
| 6962767 | Acetal compound, polymer, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2005-11-08 |
| 6835525 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Kenji Funatsu | 2004-12-28 |
| 6794111 | Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation | Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Tomohiro Kobayashi | 2004-09-21 |
| 6784268 | Ether, polymer, resist composition and patterning process | Mutsuo Nakashima, Tsunehiro Nishi | 2004-08-31 |
| 6780563 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima, Tsunehiro Nishi +1 more | 2004-08-24 |
| 6743566 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi +1 more | 2004-06-01 |
| 6673515 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2004-01-06 |
| 6670498 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima +1 more | 2003-12-30 |
| 6660448 | Polymer, resist composition and patterning process | Mutsuo Nakashima, Tsunehiro Nishi, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2003-12-09 |
| 6624335 | Ether, polymer, resist composition and patterning process | Mutsuo Nakashima, Tsunehiro Nishi | 2003-09-23 |
| 6596463 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima +1 more | 2003-07-22 |
| 6586157 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima +1 more | 2003-07-01 |
| 6566038 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2003-05-20 |
| 6531627 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima +1 more | 2003-03-11 |
| 6524765 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Takeru Watanabe, Jun Hatakeyama, Takeshi Kinsho, Koji Hasegawa | 2003-02-25 |
| 6515150 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi +1 more | 2003-02-04 |
| 6515149 | Acetal compound, polymer, resist composition and patterning response | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2003-02-04 |
| 6500961 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2002-12-31 |
| 6500971 | Ester compounds having alicyclic and oxirane structures and method for preparing the same | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2002-12-31 |
| 6492090 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa +1 more | 2002-12-10 |
| 6472543 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2002-10-29 |
| 6403823 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima, Tsunehiro Nishi +1 more | 2002-06-11 |
| 6403822 | Ester compounds having alicyclic structure and method for preparing same | Takeru Watanabe, Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Tsunehiro Nishi +1 more | 2002-06-11 |