MS

Michihiro Sugo

SC Shin-Etsu Chemical Co.: 78 patents #27 of 2,176Top 2%
Overall (All Time): #23,393 of 4,157,543Top 1%
78
Patents All Time

Issued Patents All Time

Showing 1–25 of 78 patents

Patent #TitleCo-InventorsDate
12322637 Wafer processing laminate, temporary adhesive material for wafer processing, and method for manufacturing thin wafer Mitsuo Muto, Shohei Tagami 2025-06-03
12187989 Cleaning solution for temporary adhesive for substrates, substrate cleaning method, and cleaning method for support or substrate Masahito Tanabe, Shohei Tagami 2025-01-07
12168759 Detergent composition, substrate cleaning method, and cleaning method for support or substrate Masahito Tanabe 2024-12-17
12055853 Photosensitive resin composition, laminate, and pattern forming process Kumiko Hayashi 2024-08-06
11970639 Temporary adhesive for wafer processing, wafer laminate and method for producing thin wafer Mitsuo Muto, Shohei Tagami 2024-04-30
11460774 Photosensitive resin composition, photosensitive dry film, and pattern forming process Yoshinori Hirano, Satoshi Asai, Takahiro Goi 2022-10-04
11262655 Photosensitive resin composition, photosensitive dry film, and pattern forming process Hitoshi Maruyama, Hideto Kato 2022-03-01
11183417 Method for manufacturing laminate and method for manufacturing substrate Masahito Tanabe 2021-11-23
11069557 Method for producing thin wafer Hiroyuki Yasuda 2021-07-20
10991611 Wafer processing laminate and method for processing wafer Shohei Tagami, Hideto Kato 2021-04-27
10982053 Polymer containing silphenylene and polyether structures Hitoshi Maruyama, Hideto Kato 2021-04-20
10950481 Method for manufacturing thin substrate Masahito Tanabe 2021-03-16
10854496 Circuit substrate processing laminate and method for processing circuit substrate Shohei Tagami 2020-12-01
10796939 Temporary adhesive film roll for substrate processing, method for manufacturing thin wafer Masahito Tanabe, Kazunori Kondo, Hiroyuki Yasuda 2020-10-06
10727103 Semiconductor device, method for producing the same, and laminate Hiroyuki Yasuda 2020-07-28
10658314 Wafer laminate, method for production thereof, and adhesive composition for wafer laminate Hiroyuki Yasuda, Hideto Kato 2020-05-19
10553552 Wafer laminate and method of producing the same Hiroyuki Yasuda, Hideto Kato 2020-02-04
10451970 Silicone skeleton-containing polymer, photo-curable resin composition, photo-curable dry film, laminate, and patterning process Hitoshi Maruyama, Kazunori Kondo 2019-10-22
10453732 Wafer laminate and making method Hiroyuki Yasuda, Hideto Kato 2019-10-22
10373903 Laminate and making method Hiroyuki Yasuda, Hideto Kato, Kazunori Kondo 2019-08-06
10319653 Semiconductor apparatus, stacked semiconductor apparatus, encapsulated stacked-semiconductor apparatus, and method for manufacturing the same Katsuya Takemura, Kyoko Soga, Satoshi Asai, Kazunori Kondo, Hideto Kato 2019-06-11
10308787 Resin composition, resin film, method for producing resin film, method for producing semiconductor device, and semiconductor device Kazunori Kondo, Yoichiro Ichioka 2019-06-04
10297485 Semiconductor device, making method, and laminate Hiroyuki Yasuda, Hideto Kato, Kazunori Kondo 2019-05-21
10242902 Wafer processing laminate, temporary adhesive material for wafer processing, and method for manufacturing thin wafer Hiroyuki Yasuda, Shohei Tagami, Masahito Tanabe 2019-03-26
10147632 Wafer processing laminate, temporary adhesive material for wafer processing, and method for manufacturing thin wafer Shohei Tagami, Hiroyuki Yasuda, Masahito Tanabe 2018-12-04