Issued Patents All Time
Showing 51–75 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641672 | Replaceable shielding apparatus | — | 2003-11-04 |
| 6630396 | Use of a silicon carbide adhesion promoter layer to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon | Hongning Yang | 2003-10-07 |
| 6610169 | Semiconductor processing system and method | Tai Dung Nguyen, Craig Bercaw | 2003-08-26 |
| 6609632 | Removable lid and floating pivot | Craig Bercaw | 2003-08-26 |
| 6572707 | Vaporizer for sensitive precursors | — | 2003-06-03 |
| 6572706 | Integrated precursor delivery system | Craig Bercaw | 2003-06-03 |
| 6565661 | High flow conductance and high thermal conductance showerhead system and method | — | 2003-05-20 |
| 6555916 | Integrated circuit prepared by selectively cleaning copper substrates, in-situ, to remove copper oxides | Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2003-04-29 |
| 6495449 | Multilayered diffusion barrier structure for improving adhesion property | — | 2002-12-17 |
| 6488272 | Liquid delivery system emulsifier | — | 2002-12-03 |
| 6444039 | Three-dimensional showerhead apparatus | — | 2002-09-03 |
| 6440878 | Method to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon using a silicon carbide adhesion promoter layer | Hongning Yang | 2002-08-27 |
| 6440219 | Replaceable shielding apparatus | — | 2002-08-27 |
| 6355562 | Adhesion promotion method for CVD copper metallization in IC applications | Lawrence J. Charneski, Gautam Bhandari | 2002-03-12 |
| 6284052 | In-situ method of cleaning a metal-organic chemical vapor deposition chamber | Lawrence J. Charneski | 2001-09-04 |
| 6281377 | Substituted cycloalkene new copper precursors for chemical vapor deposition of copper metal thin films | Wei-Wei Zhuang, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2001-08-28 |
| 6281589 | System of selectively cleaning copper substrate surfaces, in-situ, to remove copper oxides | Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2001-08-28 |
| 6274421 | Method of making metal gate sub-micron MOS transistor | Sheng Teng Hsu, David R. Evans | 2001-08-14 |
| 6245261 | Substituted phenylethylene precursor and synthesis method | Wei-Wei Zhuang, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2001-06-12 |
| 6221166 | Multi-thermal zone shielding apparatus | Craig Bercaw | 2001-04-24 |
| 6218734 | Copper adhered to a diffusion barrier surface | Lawrence J. Charneski | 2001-04-17 |
| 6184157 | Stress-loaded film and method for same | Sheng Teng Hsu, Hongning Yang, David R. Evans, Yanjun Ma | 2001-02-06 |
| 6111619 | Method of forming polycrystalline silicon TFTs with TiN/Cu/TiN interconnections for a liquid crystal display pixel array | Shusheng He | 2000-08-29 |
| 6090781 | Stabilizing formulation for NGF | Linda DeYoung, Xanthe M. Lam, Michael F. Powell | 2000-07-18 |
| 6090960 | Precursor with (methoxy) (methyl) silylolefin ligand to deposit copper and method same | Yoshihide Senzaki, Lawrence J. Charneski, Masato Kobayashi | 2000-07-18 |