Issued Patents All Time
Showing 26–50 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7361387 | Plasma enhanced pulsed layer deposition | — | 2008-04-22 |
| 7235484 | Nanolayer thick film processing system and method | Tai Dung Nguyen | 2007-06-26 |
| 7163721 | Method to plasma deposit on organic polymer dielectric film | Zhihong Zhang, Tai Dung Nguyen | 2007-01-16 |
| 7153542 | Assembly line processing method | Tai Dung Nguyen, Craig Bercaw | 2006-12-26 |
| 7141348 | Lamination and delamination technique for thin film processing | James R. Sheats | 2006-11-28 |
| 7115169 | Replaceable shielding apparatus | — | 2006-10-03 |
| 7087522 | Multilayer copper structure for improving adhesion property | — | 2006-08-08 |
| 7074278 | Removable lid and floating pivot | Craig Bercaw | 2006-07-11 |
| 7049549 | Multi-thermal zone shielding apparatus | Craig Bercaw | 2006-05-23 |
| 6998097 | High pressure chemical vapor trapping system | — | 2006-02-14 |
| 6964947 | Stabilizing formulation for NGF | Linda R. De Young, Xanthe M. Lam, Michael F. Powell | 2005-11-15 |
| 6946178 | Lamination and delamination technique for thin film processing | James R. Sheats | 2005-09-20 |
| 6921555 | Method and system for sequential processing in a two-compartment chamber | Tai Dung Nguyen, Craig Bercaw | 2005-07-26 |
| 6919101 | Method to deposit an impermeable film on porous low-k dielectric film | Zhihong Zhang, Tai Dung Nguyen | 2005-07-19 |
| 6858085 | Two-compartment chamber for sequential processing | Tai Dung Nguyen, Craig Bercaw | 2005-02-22 |
| 6859262 | Redistributing radiation guide | — | 2005-02-22 |
| 6844527 | Multi-thermal zone shielding apparatus | Craig Bercaw | 2005-01-18 |
| 6800254 | Visual indicator cold trapping system | Craig Bercaw | 2004-10-05 |
| 6777331 | Multilayered copper structure for improving adhesion property | — | 2004-08-17 |
| 6756318 | Nanolayer thick film processing system and method | Tai Dung Nguyen | 2004-06-29 |
| 6705816 | Wafer transport mechanism | Tai Dung Nguyen | 2004-03-16 |
| 6689220 | Plasma enhanced pulsed layer deposition | — | 2004-02-10 |
| 6669870 | Substituted phenylethylene precursor synthesis method | Wei-Wei Zhuang, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2003-12-30 |
| 6670266 | Multilayered diffusion barrier structure for improving adhesion property | Tai Dung Nguyen | 2003-12-30 |
| 6645860 | Adhesion promotion method for CVD copper metallization in IC applications | Lawrence J. Charneski, Gautam Bhandari | 2003-11-11 |