Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498061 | Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation | Rama Divakaruni, Stephan Kudelka, Helmut Tews, Irene McStay, Uwe Schroeder | 2002-12-24 |
| 6329237 | Method of manufacturing a capacitor in a semiconductor device using a high dielectric tantalum oxide or barium strontium titanate material that is treated in an ozone plasma | Kyong-Min Kim, Chan Lim, Ki-Seon Park | 2001-12-11 |
| 6077734 | Method of fabricating semiconductor device with extremely shallow junction | — | 2000-06-20 |
| 5898007 | Method for forming wells of a semiconductor device | — | 1999-04-27 |
| 5872047 | Method for forming shallow junction of a semiconductor device | Sang Ho Yu | 1999-02-16 |
| 5846887 | Method for removing defects by ion implantation using medium temperature oxide layer | Byung Jin Cho | 1998-12-08 |
| 5773337 | Method for forming ultra-shallow junction of semiconductor device | — | 1998-06-30 |
| 5683920 | Method for fabricating semiconductor devices | — | 1997-11-04 |
| 5677213 | Method for forming a semiconductor device having a shallow junction and a low sheet resistance | — | 1997-10-14 |
| 5668020 | Method for forming impurity junction regions of semiconductor device | — | 1997-09-16 |