Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8475980 | Methods of forming semiconductor devices using photolithographic shot grouping | Jin Sung Choi, Hee-Bom Kim, Sang-Hee Lee | 2013-07-02 |
| 8329381 | Pattern forming method | Jin Sung Choi, Hee-Bom Kim, Sang-Hee Lee | 2012-12-11 |
| 7939223 | Photomask using separated exposure technique, method of fabricating photomask, and apparatus for fabricating photomask by using the method | Hak-Seung Han, Seong-woon Choi, Hee-Bom Kim, Sung Ho Park | 2011-05-10 |
| 7763397 | Photomask registration errors of which have been corrected and method of correcting registration errors of photomask | Myoung-Soo Lee, Suk-Jong Bae, Jung Hoon Lee, Seong-woo Choi | 2010-07-27 |
| 7369254 | System and method for measuring dimension of patterns formed on photomask | Dong Gun Lee, Seong-woon Choi, Sang-Yong Yu, Seong-yong Moon | 2008-05-06 |