Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852636 | Method of designing layout of photomask and method of manufacturing photomask | Yong Seok Jung, Sung Hoon Park, Jong Su Kim | 2020-12-01 |
| 7763397 | Photomask registration errors of which have been corrected and method of correcting registration errors of photomask | Myoung-Soo Lee, Jung Hoon Lee, Seong-woo Choi, Byung-Gook Kim | 2010-07-27 |
| 7646472 | Off-axis illumination apparatus, exposure apparatus and off-axis illumination method | Myoung-Soo Lee | 2010-01-12 |
| 7630079 | Equipment and method for measuring transmittance of photomask under off axis illumination | Myoung-Soo Lee | 2009-12-08 |
| 7507505 | Fabrication method of extreme ultraviolet radiation mask mirror using atomic force microscope lithography | Hai Won Lee, Sun-Woo Lee, Jin Ho Ahn | 2009-03-24 |