Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507505 | Fabrication method of extreme ultraviolet radiation mask mirror using atomic force microscope lithography | Sun-Woo Lee, Jin Ho Ahn, Suk-Jong Bae | 2009-03-24 |
| 5981141 | Chemically amplified resists | Sang-jun Choi, Chun-geun Park | 1999-11-09 |