Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12220784 | Chemical mechanical polishing pad and preparation thereof | Bainian Qian, Robert Blomquist, Lyla M. El-Sayed, Michael E. Mills, Bradley K. Taylor +1 more | 2025-02-11 |
| 11679531 | Chemical mechanical polishing pad and preparation thereof | Bainian Qian, Robert Blomquist, Lyla M. El-Sayed, Michael E. Mills, Bradley K. Taylor +1 more | 2023-06-20 |
| 11524390 | Methods of making chemical mechanical polishing layers having improved uniformity | Bainian Qian, George C. Jacob, Andrew Wank, David Shidner, Donna M. Alden +1 more | 2022-12-13 |
| 10464187 | High removal rate chemical mechanical polishing pads from amine initiated polyol containing curatives | Bainian Qian, George C. Jacob, Marty W. DeGroot | 2019-11-05 |
| 10316218 | Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them | Naresh Kumar Penta, Julia Kozhukh, David Mosley, Matthew Van Hanehem | 2019-06-11 |
| 10221336 | Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them | Julia Kozhukh, David Mosley, Naresh Kumar Penta, Matthew Van Hanehem | 2019-03-05 |
| 8790160 | Chemical mechanical polishing composition and method for polishing phase change alloys | Jaeseok Lee, Yi Guo, Guangyun Zhang | 2014-07-29 |
| 8568610 | Stabilized, concentratable chemical mechanical polishing composition and method of polishing a substrate | Zhendong Liu, Yi Guo, Guangyun Zhang | 2013-10-29 |
| 8513126 | Slurry composition having tunable dielectric polishing selectivity and method of polishing a substrate | Zhendong Liu, Yi Guo, Guangyun Zhang | 2013-08-20 |
| 8496843 | Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride | Yi Guo, Zhendong Liu, Guangyun Zhang | 2013-07-30 |
| 8492277 | Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride | Yi Guo, Zhendong Liu, Guangyun Zhang | 2013-07-23 |
| 8491808 | Method of polishing a substrate comprising polysilicon, silicon oxide and silicon nitride | Yi Guo, Zhendong Liu, Guangyun Zhang | 2013-07-23 |
| 8444728 | Stabilized chemical mechanical polishing composition and method of polishing a substrate | Yi Guo, Zhendong Liu, Guangyun Zhang | 2013-05-21 |
| 8440094 | Method of polishing a substrate | Yi Guo | 2013-05-14 |
| 8435420 | Method of polishing using tunable polishing formulation | Yi Guo | 2013-05-07 |
| 8431490 | Method of chemical mechanical polishing a substrate with polishing composition adapted to enhance silicon oxide removal | Yi Guo, Zhendong Liu, Guangyun Zhang | 2013-04-30 |
| 8309468 | Chemical mechanical polishing composition and method for polishing germanium-antimony-tellurium alloys | Jaeseok Lee, Yi Guo, Guangyun Zhang | 2012-11-13 |
| 8232208 | Stabilized chemical mechanical polishing composition and method of polishing a substrate | Yi Guo, Zhendong Liu, Guangyun Zhang | 2012-07-31 |
| 8025813 | Chemical mechanical polishing composition and methods relating thereto | Zhendong Liu, Yi Guo, Guangyun Zhang | 2011-09-27 |