Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8865013 | Method for chemical mechanical polishing tungsten | Yi Guo, Jerry Lee, Raymond Lavoie | 2014-10-21 |
| 8790160 | Chemical mechanical polishing composition and method for polishing phase change alloys | Jaeseok Lee, Yi Guo, Kancharla-Arun Kumar Reddy | 2014-07-29 |
| 8568610 | Stabilized, concentratable chemical mechanical polishing composition and method of polishing a substrate | Zhendong Liu, Yi Guo, Kancharla-Arun Kumar Reddy | 2013-10-29 |
| 8513126 | Slurry composition having tunable dielectric polishing selectivity and method of polishing a substrate | Zhendong Liu, Yi Guo, Kancharla-Arun Kumar Reddy | 2013-08-20 |
| 8496843 | Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride | Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy | 2013-07-30 |
| 8492277 | Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride | Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy | 2013-07-23 |
| 8491808 | Method of polishing a substrate comprising polysilicon, silicon oxide and silicon nitride | Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy | 2013-07-23 |
| 8444728 | Stabilized chemical mechanical polishing composition and method of polishing a substrate | Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy | 2013-05-21 |
| 8431490 | Method of chemical mechanical polishing a substrate with polishing composition adapted to enhance silicon oxide removal | Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy | 2013-04-30 |
| 8309468 | Chemical mechanical polishing composition and method for polishing germanium-antimony-tellurium alloys | Jaeseok Lee, Yi Guo, Kancharla-Arun Kumar Reddy | 2012-11-13 |
| 8232208 | Stabilized chemical mechanical polishing composition and method of polishing a substrate | Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy | 2012-07-31 |
| 8025813 | Chemical mechanical polishing composition and methods relating thereto | Zhendong Liu, Yi Guo, Kancharla-Arun Kumar Reddy | 2011-09-27 |