Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8418559 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Zhiyu Pan, Christoph Lang, Matthias Metz, Markus Ulm | 2013-04-16 |
| 8317882 | Method of manufacturing a planar electrode with large surface area | Po-Jui Chen, Matthieu Liger, Matthias Illing | 2012-11-27 |
| 8232143 | Device formed using a hard mask and etch stop layer | — | 2012-07-31 |
| 8187903 | Method of epitaxially growing piezoresistors | Beth L. Pruitt, Arnoldus Alvin Barlian | 2012-05-29 |
| 7981308 | Method of etching a device using a hard mask and etch stop layer | — | 2011-07-19 |
| 7956428 | Microelectromechanical devices and fabrication methods | — | 2011-06-07 |
| 7875482 | Substrate with multiple encapsulated pressures | Robert N. Candler | 2011-01-25 |
| 7757555 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Zhiyu Pan, Christoph Lang, Matthias Metz, Markus Ulm | 2010-07-20 |
| 7750758 | Multi-ring resonator system and method | Pan Zhiyu, Robert N. Candler, Markus Lutz, Aaron Partridge | 2010-07-06 |
| 7671515 | Microelectromechanical devices and fabrication methods | Matthias Metz, Zhiyu Pan, Brian Stark, Markus Ulm | 2010-03-02 |
| 7625773 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Wilhelm Frey, Markus Ulm, Matthias Metz +1 more | 2009-12-01 |
| 7449355 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Wilhelm Frey, Markus Ulm, Matthias Metz +1 more | 2008-11-11 |
| 7401517 | Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement | Zhiyu Pan, Christoph Lang | 2008-07-22 |
| 7319372 | In-plane mechanically coupled microelectromechanical tuning fork resonators | Zhiyu Pan, Rob Norris Candler, Markus Lutz, Aaron Partridge, Volker Materna +1 more | 2008-01-15 |