Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5231057 | Method of depositing insulating layer on underlying layer using plasma-assisted CVD process using pulse-modulated plasma | Masahiko Doki, Junya Nakahira | 1993-07-27 |
| 5111266 | Semiconductor device having a region doped to a level exceeding the solubility limit | Fumitake Mieno, Tsutomu Nakazawa, Takashi Eshita, Mamoru Maeda, Tsunenori Yamauchi | 1992-05-05 |
| 5103285 | Silicon carbide barrier between silicon substrate and metal layer | Fumitake Mieno, Takashi Eshita, Kikuo Itoh, Masahiko Doki | 1992-04-07 |
| 5082695 | Method of fabricating an X-ray exposure mask | Masao Yamada, Masafumi Nakaishi, Kenji Nakagawa, Takashi Eshita, Fumitake Mieno | 1992-01-21 |
| 4906593 | Method of producing a contact plug | Yoshimi Shioya, Yasushi Ohyama, Shin-ichi Inoue, Tsutomu Ogawa, Kiyoshi Watanabe +1 more | 1990-03-06 |
| 4876219 | Method of forming a heteroepitaxial semiconductor thin film using amorphous buffer layers | Takashi Eshita, Fumitake Mieno, Takuya Watanabe | 1989-10-24 |
| 4855254 | Method of growing a single crystalline .beta.-SiC layer on a silicon substrate | Takashi Eshita, Fumitake Mieno, Kikuo Itoh | 1989-08-08 |
| 4510177 | Method and apparatus for vapor phase deposition | Takeshi Nishizawa | 1985-04-09 |
| 4509070 | Metal-insulator-semiconductor transistor device | — | 1985-04-02 |