Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5906912 | Processes for forming resist pattern and for producing semiconductor device | Keiji Watanabe, Miwa Igarashi, Ei Yano, Keiko Yano, Takashi Maruyama +2 more | 1999-05-25 |
| 5082695 | Method of fabricating an X-ray exposure mask | Masao Yamada, Kenji Nakagawa, Yuji Furumura, Takashi Eshita, Fumitake Mieno | 1992-01-21 |
| 4820546 | Method for production of X-ray-transparent membrane | Masao Yamada | 1989-04-11 |