Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

US Patent RE49066 · Granted May 10, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for measuring intensity in a lithographic alignment apparatu2025
Sub micron particle detection on burl tops by applying a variable voltage to an 2025
Substrate holder, lithographic apparatus, device manufacturing method, and metho2025
Substrate holder and method of manufacturing a substrate holder2025
Object holder, electrostatic sheet and method for making an electrostatic sheet2025
Method to manufacture nano ridges in hard ceramic coatings2024
Substrate holder, lithographic apparatus, device manufacturing method, and metho2024
Lithographic apparatus, substrate table, and method2024
Substrate holder, lithographic apparatus, device manufacturing method, and metho2024
Substrate holder and method of manufacturing a substrate holder2023
Lithography apparatus2023
Substrate holder, lithographic apparatus, device manufacturing method, and metho2023