Coarse motion and fine motion integrated reticle stage driven by planar motor

Assignee

• Tsinghua University
• Beijing U-Precision Tech Co.

Inventors

• Yu Zhu (66 patents)
• Ming Zhang (48 patents)
• Fan Zhi (3 patents)
• Zhao Liu (9 patents)
• Rong Cheng (27 patents)
• Kaiming Yang (27 patents)
• Li Zhang (1,039 patents)
• Huichao Qin (3 patents)
• Yanpo Zhao (3 patents)
• Li Tian (63 patents)
• Weinan Ye (7 patents)
• Jin Zhang (6 patents)
• Wensheng Yin (23 patents)
• Haihua Mu (14 patents)
• Jinchun Hu (26 patents)

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