Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Rong Cheng +10 more | 2018-02-27 |
| 9904183 | Coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Rong Cheng +9 more | 2018-02-27 |
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Ming Zhang, Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang +9 more | 2017-10-17 |