Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10532832 | Magnetic levitation reaction sphere | Ming Zhang, Yu Zhu, Anlin Chen, Kaiming Yang, Rong Cheng +4 more | 2020-01-14 |
| 9995569 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage | Yu Zhu, Ming Zhang, Anlin Chen, Rong Cheng, Kaiming Yang +6 more | 2018-06-12 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Rong Cheng +10 more | 2018-02-27 |
| 9904183 | Coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Rong Cheng +9 more | 2018-02-27 |
| 9885556 | Dual-frequency grating interferometer displacement measurement system | Yu Zhu, Ming Zhang, Leijie Wang, Jinchun Hu, Longmin Chen +3 more | 2018-02-06 |
| 9879979 | Heterodyne grating interferometer displacement measurement system | Ming Zhang, Yu Zhu, Leijie Wang, Jinchun Hu, Longmin Chen +3 more | 2018-01-30 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Leijie Wang, Rong Cheng, Kaiming Yang +5 more | 2018-01-16 |
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Ming Zhang, Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang +9 more | 2017-10-17 |
| 9766054 | Planar motor rotor displacement measuring device and its measuring method | Jinchun Hu, Yu Zhu, Wensheng Yin, Longmin Chen, Kaiming Yang +4 more | 2017-09-19 |
| 9752643 | Negative stiffness system for gravity compensation of micropositioner | Yu Zhu, Ming Zhang, Zhao Liu, Rong Cheng, Jing Wang +7 more | 2017-09-05 |
| 9310782 | Method for measuring displacement of planar motor rotor | Yu Zhu, Jinchun Hu, Dengfeng Xu, Yuting Sun, Wensheng Yin +2 more | 2016-04-12 |
| 9310797 | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | Kaiming Yang, Yu Zhu, Dongdong YU, Rong Cheng, Ming Zhang +5 more | 2016-04-12 |
| 9182217 | Method for measuring displacement of large-range moving platform | Ming Zhang, Yu Zhu, Hao Liu, Yi Jiang, Zhao Liu +4 more | 2015-11-10 |
| 8958078 | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space | Ming Zhang, Yu Zhu, Zhao Liu, Jinchun Hu, Dengfeng Xu +2 more | 2015-02-17 |