Process feed management for semiconductor substrate processing

Assignee

• Asm America

Inventors

• Fred Pettinger (3 patents)
• Carl Louis White (65 patents)
• Dave Marquardt (5 patents)
• Sokol Ibrani (7 patents)
• Eric James Shero (129 patents)
• Todd Robert Dunn (32 patents)
• Kyle Fondurulia (26 patents)
• Mike Halpin (13 patents)

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