Boron implanting using a co-gas

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• Bon-Woong Koo (78 patents)
• Vikram M. Bhosle (15 patents)
• John A. Frontiero (10 patents)
• Nicholas P. T. Bateman (38 patents)
• Timothy J. Miller (48 patents)
• Svetlana B. Radovanov (54 patents)
• Min Sung JEON (5 patents)
• Peter F. Kurunczi (47 patents)
• Christopher J. Leavitt (16 patents)

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