Electrostatic chuck apparatus

Assignee

• Tokyo Electron Limited
• Sumitomo Osaka Cement Co.

Inventors

• Yasuharu Sasaki (71 patents)
• Kenji Masuzawa (6 patents)
• Toshiyuki MAKABE (5 patents)
• Mamoru Kosakai (32 patents)
• Takashi Satou (65 patents)
• Kazunori Ishimura (10 patents)
• Ryuuji Hayahara (7 patents)
• Hitoshi Kouno (10 patents)

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