Lithographic apparatus and device manufacturing method

Assignee

• Asml Netherlands B.V.
• Carl Zeiss Smt Gmbh

Inventors

• Marc Wilhelmus Maria Van Der Wijst (43 patents)
• Hans Butler (152 patents)
• Erik Roelof Loopstra (328 patents)
• Bernhard Geuppert (35 patents)
• Marco Hendrikus Hermanus Oude Nijhuis (7 patents)
• Rodolfo Guglielmi Rabe (2 patents)
• Yim-Bun Patrick Kwan (83 patents)
• Dick Antonius Hendrikus Laro (5 patents)

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