Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222495 | Seismic shaker | Enrique Van De Groes | 2019-03-05 |
| 9829808 | Method for controlling a motion of optical elements in lithography systems | Yim-Bun Patrick Kwan | 2017-11-28 |
| 9696630 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Erik Roelof Loopstra, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis +2 more | 2017-07-04 |
| 9134632 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Yim-Bun Patrick Kwan, Erik Roelof Loopstra, Bernhard Geuppert +2 more | 2015-09-15 |
| 9030647 | Optical imaging arrangement with vibration decoupled support units | Yim-Bun Patrick Kwan | 2015-05-12 |