Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Slit valve with a pressurized gas bearing

Slit valve with a pressurized gas bearing

US Patent 9587749 · Granted Mar 7, 2017

Estimated economic value: $38,660,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Atomic layer deposition coating system for inner walls of gas lines2025
System and method for isolation of specific fourier pupil frequency in overlay m2025
Methods of operating a spatial deposition tool2025
Atomic layer deposition coatings for high temperature ceramic components2025
Mainframe of dual-robot substrate processing system2025
Plasma chamber with multiphase rotating independent gas cross-flow with reduced 2025
Parallel atomic layer deposition of target element interiors2025
Massive overlay metrology sampling with multiple measurement columns2025
Equipment front end modules with induced gas mixing, and methods of use thereof2025
In-situ process chamber chuck cleaning by cleaning substrate2025
Substrate support gap pumping to prevent glow discharge and light-up2025
Oscillating secondary stage for frame-mode overlay metrology2025