System and method for generation of extreme ultraviolet light

Assignee

• Kla-Tencor

Inventors

• Alexander N. Bykanov (46 patents)
• Oleg Khodykin (21 patents)
• Daniel Wack (33 patents)
• Konstantin Tsigutkin (7 patents)
• Layton Hale (16 patents)
• Joseph F. Walsh (17 patents)
• Frank Chilese (16 patents)
• Rudy F. Garcia (38 patents)
• Unknown

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