Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product

Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product

US Patent 9507279 · Granted Nov 29, 2016

Estimated economic value: $3,200,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for optimizing a sampling scheme and associated apparatuses2025
Determining lithographic matching performance2025
Methods and apparatus for obtaining diagnostic information relating to an indust2025
Apparatus and method for property joint interpolation and prediction2025
Methods of modelling systems for performing predictive maintenance of systems, s2025
Computational metrology2025
Method of wafer alignment using at resolution metrology on product features2024
Method of manufacturing devices2024
Method and apparatus for optimization of lithographic process2024
Method to label substrates based on process parameters2024
Method for monitoring lithographic apparatus2024
Methods and apparatus for obtaining diagnostic information relating to an indust2024