Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Target for extreme ultraviolet light source

Target for extreme ultraviolet light source

US Patent 9462668 · Granted Oct 4, 2016

Estimated economic value: $8,030,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Guiding device and associated system2025
Laser system for source material conditioning in an EUV light source2025
Laser system for source material conditioning in an EUV light source2025
Laser system for source material conditioning in an EUV light source2025
Oxygen-loss resistant top coating for optical elements2025
Oxygen-loss resistant top coating for optical elements2025
Optical isolation module2025
Optical isolation module2025
EUV light source target metrology2025
System for monitoring a plasma2024
System for monitoring a plasma2024
Laser system for target metrology and alteration in an EUV light source2024