Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inspection apparatus, lithographic apparatus, and device manufacturing method

Inspection apparatus, lithographic apparatus, and device manufacturing method

US Patent 9285687 · Granted Mar 15, 2016

Estimated economic value: $5,623,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical designs of miniaturized overlay measurement system2024
Invariable magnification multilevel optical device with telecentric converter2024
Apparatus and method for determining a condition associated with a pellicle2024
Broad spectrum radiation by supercontinuum generation using a tapered optical fi2023
Lithographic patterning device multichannel position and level gauge2023
Lithographic apparatus, metrology apparatus, optical system and method2022
Lithography supports with defined burltop topography2022
Beam splitting prism systems2021
Beam splitting prism systems2021
Adaptive filter for in-line correction2021
Lithographic cluster, lithographic apparatus, and device manufacturing method2021
Metrology method and device2020