Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Adaptive filter for in-line correction

Adaptive filter for in-line correction

US Patent 10928738 · Granted Feb 23, 2021

Estimated economic value: $69,319,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Generating an alignment signal based on local alignment mark distortions2025
Asymmetry extended grid model for wafer alignment2025
Metrology method and associated metrology and lithographic apparatuses2024
Wafer alignment using form birefringence of targets or product2024
Apparatus for and method of sensing alignment marks2024
Adaptive alignment2022
Noise correction for alignment signal2022
Alignment sensor apparatus for process sensitivity compensation2021
Alignment mark for two-dimensional alignment in an alignment system2021
Lithographic cluster, lithographic apparatus, and device manufacturing method2021
Broad spectrum radiation by supercontinuum generation using a tapered optical fi2020
Alignment system wafer stack beam analyzer2019