Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatuses for reducing porogen accumulation from a UV-cure chamber

Method and apparatuses for reducing porogen accumulation from a UV-cure chamber

US Patent 9073100 · Granted Jul 7, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical registration in a computer-aided system2025
Spatially tunable deposition to compensate within wafer differential bow2025
Remote-plasma clean (RPC) directional-flow device2024
Spatially tunable deposition to compensate within wafer differential bow2024
Remote-plasma clean (RPC) directional-flow device2023
Self-watering planter tray2022
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021