Substrate plasma processing apparatus and plasma processing method

Assignee

• Kabushiki Kaisha Toshiba
• Tokyo Electron Limited

Inventors

• Akio Ui (22 patents)
• Naoki Tamaoki (11 patents)
• Takashi Ichikawa (100 patents)
• Hisataka Hayashi (35 patents)
• Takeshi Kaminatsui (2 patents)
• Shinji Himori (54 patents)
• Unknown
• Takeshi Ohse (8 patents)
• Jun Abe (71 patents)

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