MEMS device etch stop

Assignee

• TSMC

Inventors

• Chia-Hua Chu (186 patents)
• Yi Heng Tsai (36 patents)
• Kai-Chih Liang (25 patents)
• Chia-Pao Shu (13 patents)
• Li-Cheng Chu (22 patents)
• Kuei-Sung Chang (87 patents)
• Hsueh-An Yang (19 patents)
• Chung-Hsien Lin (68 patents)

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