Plasma processing method and apparatus

Assignee

• Tokyo Electron Limited

Inventors

• Akira Koshiishi (66 patents)
• Jun Hirose (71 patents)
• Masahiro Ogasawara (30 patents)
• Taichi Hirano (20 patents)
• Hiromitsu Sasaki (29 patents)
• Unknown
• Michishige Saito (17 patents)
• Hiroyuki Ishihara (58 patents)
• Jun Ooyabu (12 patents)
• Kohji Numata (14 patents)

View full patent text on Google Patents →