Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method

Assignee

• Tokyo Electron Limited
• Ibiden Co.

Inventors

• Kiyoshi Takekoshi (26 patents)
• Hisatomi Hosaka (13 patents)
• Junichi Hagihara (21 patents)
• Kunihiko Hatsushika (3 patents)
• Takamasa Usui (75 patents)
• Hisashi Kaneko (85 patents)
• Nobuo Hayasaka (71 patents)
• Yoshiyuki Ido (5 patents)

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